Rough vacuum down to 50 mbarA, and lower intermittently, can be achieved with a single-stage in continuous operation, with two-stage packages achieving 1-2 mbarA. As with compressors, the vacuum pumps can be air or water cooled and are capable of handling wet and dirty gasses. Flow rates above 1200 m3/hr can be obtained by single machines and again these can be operated in parallel to achieve higher flow rates.
